- China has begun mass producing domestically developed immersion DUV lithography machines, a technology crucial to advanced chipmaking, marking a key step forward in Beijing's drive to reduce its reliance on foreign technologies.
- Shanghai Aishengna Electronic Technology Group is leading the production effort after incorporating teams from top Chinese lithography startups.
- The company plans to produce about five machines this year and roughly 20 in 2027.
- The Chinese-made DUV machines are expected to be delivered this year to leading Chinese chipmakers including Semiconductor Manufacturing International Corp (SMIC), Hua Hong Semiconductor and ChangXin Memory Technologies (CXMT).
- The development represents a win for Beijing's nationwide semiconductor self-sufficiency initiative, one of President Xi Jinping's highest priorities.
- Aishengna was established in August 2023 with registered capital of 7 billion yuan ($1.0 billion), backed by two state-owned shareholders.
- China has been barred by the U.S. from buying ASML's most advanced extreme-ultraviolet (EUV) lithography systems, while Dutch export controls have also restricted its access to some advanced DUV machines.
China has begun mass production of domestically developed immersion deep-ultraviolet (DUV) lithography machines, a crucial technology for advanced chipmaking, marking a significant step in its efforts to achieve semiconductor self-sufficiency. This initiative is part of President Xi Jinping's broader strategy to reduce reliance on foreign technology.
The production is spearheaded by Shanghai Aishengna Electronic Technology Group, a state-owned company that has integrated teams from leading Chinese lithography startups. The company plans to manufacture approximately five DUV machines this year and aims for 20 by 2027, according to sources familiar with the matter.2
These Chinese-made DUV machines are expected to be delivered to major domestic chipmakers, including Semiconductor Manufacturing International Corp (SMIC), Hua Hong Semiconductor, and ChangXin Memory Technologies (CXMT). This development is seen as a victory for Beijing's semiconductor self-sufficiency initiative, although it is not anticipated to pose an immediate threat to Dutch supplier ASML, which remains the leader in advanced lithography technology.45
China's efforts have been complicated by U.S. export restrictions, which have barred the country from acquiring ASML's most advanced extreme-ultraviolet (EUV) lithography systems, as well as Dutch export controls limiting access to certain advanced DUV machines.7
“Shanghai Aishengna Electronic Technology Group, established in August 2023 with 7 billion yuan ($1.0 billion) in capital, is spearheading the production. The Chinese-made DUV machines are expected to be delivered this year to major chipmakers like Semiconductor Manufacturing International Corp and Hua Hong Semiconductor.”
